Low noise accelerometer microsystem with highly configurable capacitive interface
Author:
Publisher
Springer Science and Business Media LLC
Subject
Surfaces, Coatings and Films,Hardware and Architecture,Signal Processing
Link
http://link.springer.com/content/pdf/10.1007/s10470-010-9539-8.pdf
Reference14 articles.
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2. N. Yazdi, et al. (1998). Micromachined inertial sensors. Proceedings of the IEEE, 86, 1640–1659.
3. Callegari, S., et al. (2006). Applicability of field programmable analog arrays to capacitive sensing in the sub-pF Range. Analog Integrated Circuits and Signal Processing, 47, 39–51.
4. Bangalore, S., et al. (2009). A fully differential rail-to-rail CMOS capacitance sensor with floating-gate trimming for mismatch compensation. IEEE Transactions on Circuits and Systems Part I: Regular Papers, 56, 975–986.
5. Lemkin, M., et al. (1999). A three-axis micromachined accelerometer with a CMOS position-senseinterface and digital offset-trim electronics. IEEE Journal of Solid-State Circuits, 34, 456–468.
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