Electro-mechanical hybrid PLL for MEMS oscillator temperature compensation system
Author:
Funder
Suomen Akatemia (FI)
Publisher
Springer Science and Business Media LLC
Subject
Surfaces, Coatings and Films,Hardware and Architecture,Signal Processing
Link
http://link.springer.com/content/pdf/10.1007/s10470-015-0685-x.pdf
Reference20 articles.
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2. Asl, S., Mukherjee, S., Chen, W., Joo, K., Palwai, R., Arumugam, N., Galle, P., Phadke, M., Grosjean, C., Salvia, J., Lee, H., Pamarti, S., Fiez, T., Makinwa, K., Partridge, A., Menon, V. (2014) 12.9 A 1.55 × 0.85 mm2 3 ppm 1.0 μA 32.768 khz MEMS-based oscillator. In 2014 IEEE international on solid-state circuits conference digest of technical papers (ISSCC) (pp. 226–227). doi: 10.1109/ISSCC.2014.6757411 .
3. Ayazi, F., Tabrizian, R., Sorenson, L. (2012). Compensation, tuning, and trimming of MEMS resonators. In 2012 IEEE International in frequency control symposium (FCS) (pp. 1–7). doi: 10.1109/FCS.2012.6243717 .
4. Van Beek, J.T.M., Puers, R. (2012). A review of MEMS oscillators for frequency reference and timing applications. Journal of Micromechanics and Microengineering 22(1), pp. 013,001. doi: 10.1088/0960-1317/22/1/013001 . http://iopscience.iop.org/0960-1317/22/1/013001 .
5. Bourgeois, C., Steinsland, E., Blanc, N., de Rooij, N. (1997). Design of resonators for the determination of the temperature coefficients of elastic constants of monocrystalline silicon. In Proceedings of the 1997 IEEE international frequency control symposium, 1997 (pp. 791–799). doi: 10.1109/FREQ.1997.639192 .
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1. MEMS resonator with wide frequency tuning range and linear response to control voltages for use in voltage control oscillators;Journal of Micromechanics and Microengineering;2019-10-16
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