Towards a methodology for analysis of interconnect structures for 3D-integration of micro systems

Author:

Schneider Peter,Reitz Sven,Wilde Andreas,Elst Günter,Schwarz Peter

Publisher

Springer Science and Business Media LLC

Subject

Surfaces, Coatings and Films,Hardware and Architecture,Signal Processing

Reference12 articles.

1. De Man, H. (2005). Ambient intelligence: Broad dreams and nanoscale realities. IEEE International Solid-State Circuit Conference ISSCC 2005, San Francisco, February 6–10.

2. Klumpp, A., Merkel, R., Weber, J., Wieland, R., Elst, G., & Ramm, P. (2004). Vertical system integration technology for high speed applications by using inter-chip vias and solid-liquid interdiffusion bonding. In The World of Electronic Packaging and System Integration (pp. 42–47). ddp goldenbogen, Dresden.

3. Benkart, P., Heittmann, A., Hübner, H., & Ramacher, U. (2005). 3D chip stack technology using through-chip interconnects. IEEE Design & Test of Computers (pp. 512–518).

4. Wunderle, B., Auersperg, J., Großer, V., Kaulfersch, E., Wittler, O., & Michel, B. (2003). Modular parametric finite element modelling for reliability-studies in electronic and MEMS packaging. Proc. DTIP2003, Cannes-Mandelieu, 5–7 Mai.

5. Wunderle, B., Kaulfersch, E., Ramm, P., Michel, B., & Reichl, H. (2006). Thermo-mechanical reliability of 3D-integrated microstructures in stacked silicon. Proc. 2006 MRS Fall Meeting. Boston, November 27–December 1.

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1. References;Three-Dimensional Integrated Circuit Design;2017

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3. Investigation on reliability of interconnects in 3D heterogeneous systems by ageing beam resonance method;Microelectronics Journal;2014-07

4. Anforderungen an Modellierung und Simulation von 3D–Systemen;Entwurf integrierter 3D-Systeme der Elektronik;2012

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