The effect of unbalanced coefficient of magnetron on the structure and properties of CN x coatings
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science
Link
http://link.springer.com/content/pdf/10.1007/s11595-011-0212-6.pdf
Reference16 articles.
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3. Zhao Z B, Rek Z U, Yalisove S M, et al. Phase Formation and Structure of Magnetron Sputtered Chromium Nitride Films:in-situ and ex-situ Studies[J]. Surf. Coat. Technol., 2004, 185: 329–39
4. Musil J, Baroch P, Vlcek J, et al. Reactive Magnetron Sputtering of thin Films: Present Status and Trend[J]. Thin Solid Films, 2005, 475: 208–218
5. Han S, Lin J H, Wang G H, et al. The Effect of Preferred Orientation on the Mechanical Properties of Chromium Nitride Coatings Deposited on SKD11 by Unbalanced Deposi-magnetron Sputtering[J]. Mater. Lett., 2003, 57: 1202
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