Indenter Size Effect on Stress Relaxation Behaviors of Surface-modified Silicon: A Molecular Dynamics Study
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science
Link
https://link.springer.com/content/pdf/10.1007/s11595-022-2541-z.pdf
Reference38 articles.
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3. Cao Z Q, Zhang X. Density Change and Viscous Flow during Structural Relaxation of Plasma-enhanced Chemical-vapor-deposited Silicon Oxide Films[J]. J. Appl. Phys., 2004, 96(8): 4273–4280
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