Thermodynamic analysis of chemical vapor deposition of BCl3-NH3-SiCl4-H2-Ar system-Reference-Cited by-同舟云学术

Thermodynamic analysis of chemical vapor deposition of BCl3-NH3-SiCl4-H2-Ar system

Published:2015-10 Issue:5 Volume:30 Page:951-958
ISSN:1000-2413
Container-title:Journal of Wuhan University of Technology-Mater. Sci. Ed.
language:en
Short-container-title:J. Wuhan Univ. Technol.-Mat. Sci. Edit.

Author:

Li Zan,Cheng Laifei,Liu Yongsheng,Ye Fang

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/s11595-015-1256-9.pdf

Reference13 articles.

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3. Morscher G N, Bryant D R, Tressler R E. Environmental Durability of BN-based Interphases (for SiCf/SiCm Composites) in H2O Containing Atmospheres at Intermediate Temperatures [J]. Ceramic Engineering and Science Proceedings, 1997, 18(3): 525–534

4. SUN E Y, LIN H T, Brennan J J. Intermediate-temperature Environmental Effects on Boron Nitride-coated Silicon Carbide-fiberreinforced Glass-ceramic Composites [J]. Journal of the American Ceramic Society, 1997, 80(3): 609–614

5. Luthra K L, Corman G S. Melt Infiltration SiC/SiC Composites for Gas Turbine Applications [C]. High Temperature Ceramic Matrix Composites, Germany, 2001:744–753

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3. Thermodynamic study and preparation of Si–B–N ceramic coating by LPCVD from SiCl4–NH3–BCl3–H2–Ar system;Journal of Materials Research;2017-08-15

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