Modal Analysis and Structural Optimization of MEMS Acoustic Emission Sensing Micro-elements with Variable Area for Improved Anti-interference Capability
Author:
Publisher
Springer Science and Business Media LLC
Subject
Microbiology (medical),Immunology,Immunology and Allergy
Link
https://link.springer.com/content/pdf/10.1007/s42417-023-01067-4.pdf
Reference15 articles.
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3. Jahangir A, Dar A, Othman M (2021) Influence of laser pulse on plane waves propagating in a thermoelastic medium with micro-temperature under the DPL model. J Eng Therm Sci 1(2)
4. Ohtsu M (1996) The history and development of acoustic emission in concrete engineering[J]. Mag Concr Res 48(177):321–330
5. Didem Ozevin (2020) MEMS acoustic emission sensors. Appl Sci 10(24):8966
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