Comparison of different algorithms for the interferometric determination of thicknesses in the ?m-range by IR-spectroscopy-Reference-Cited by-同舟云学术

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Comparison of different algorithms for the interferometric determination of thicknesses in the ?m-range by IR-spectroscopy

Published:1993 Issue:6-9 Volume:346 Page:604-607
ISSN:0937-0633
Container-title:Fresenius' Journal of Analytical Chemistry
language:en
Short-container-title:Fresenius J Anal Chem

Author:

Heise H. M.

Publisher

Springer Science and Business Media LLC

Subject

Biochemistry,Analytical Chemistry,Biochemistry

Link

http://link.springer.com/content/pdf/10.1007/BF00321253.pdf

Reference18 articles.

1. Harrick NJ (1977) Appl Spectrosc 31:548?549

2. Heise HM (1985) SPIE 553:247?248

3. Krishnan K, Dasari P, Stout P (1981) FTIR-spectroscopy in the semiconductor industry-epitaxial thickness measurements (Bio-Rad Application Note)

4. Engelbrecht JAA, Kleinhenz RL, Bendernagel RA (1991) SPIE 1575:566?567

5. Gauglitz G, Nahm W (1991) Fresenius J Anal Chem 341:279?283

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