Clogging monitoring and regeneration of filtration film in wafer cleaning circulation systems for semiconductor manufacturing
Author:
Funder
National Science and Technology Council
Publisher
Springer Science and Business Media LLC
Link
https://link.springer.com/content/pdf/10.1007/s00170-023-12940-7.pdf
Reference21 articles.
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3. Hirano K, Okamura J, Taira T, Sano K, Toyoda A, Ikeda M (2001) An efficient treatment technique for TMAH wastewater by catalytic oxidation. IEEE Trans Semicond Manuf 14:202–206
4. Coenen J, Martin A, Dahl O (2020) Performance assessment of chemical mechanical planarization wastewater treatment in nano-electronics industries using membrane distillation. Sep Purif Technol 235:116201
5. You SH, Tseng DH, Guo GL (2001) A case study on the wastewater reclamation and reuse in the semiconductor industry. Resour Conserv Recycl 32:73–81
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