Mapping ductile-to-fragile transition and the effect of tool nose radius in diamond turning of single-crystal silicon
Author:
Publisher
Springer Science and Business Media LLC
Subject
Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering
Link
https://link.springer.com/content/pdf/10.1007/s00170-021-08528-8.pdf
Reference48 articles.
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2. Langfelder G, Bestetti M, Gadola M (2021) Silicon MEMS inertial sensors evolution over a quarter century. J Micromechanics Microengineering 31:084002. https://doi.org/10.1088/1361-6439/ac0fbf
3. Olufayo OA, Abou-El-Hossein K (2013) Molecular dynamics modeling of nanoscale machining of silicon. Procedia CIRP 8:504–509. https://doi.org/10.1016/j.procir.2013.06.141
4. Budnitzki M, Kuna M (2016) Stress induced phase transitions in silicon. J Mech Phys Solids 95:64–91. https://doi.org/10.1016/j.jmps.2016.03.017
5. Gilman JJ (1992) Insulator-metal transitions at microindentations. J Mater Res 7:535–538. https://doi.org/10.1557/JMR.1992.0535
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