Computer vision measurement system for standards calibration in XY plane with sub-micrometer accuracy

Author:

Costa Pedro Bastos,Leta Fabiana Rodrigues,de Oliveira Baldner Felipe

Publisher

Springer Science and Business Media LLC

Subject

Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering

Reference13 articles.

1. Cauchick-Miguel P, Kimg T, Davis J (1996) CMM verification: a survey. Measurement 17:1–16

2. European Association of National Metrology Institutes – EMRP Call (2012) Optical bidirectional measurements, Middlesex, UK, p 2012 https://www.euramet.org/index.php?eID=tx_securedownloads&p=588&u=0&g=0&t=1598575410&hash=edf87941f1bd7572745bd0729a8fb43b222871bc&file=Media/docs/EMRP/JRP/JRP_Summaries_2012/SI_Broader_Scope_SRTs/SRT-s11.pdf

3. Flügge J, Weichert C, Hu H, Köning R, Bosse H, Weigmenn A, Schulz M, Elster C, Greckeler RD (2009) Interferometry at the PTB nanometer comparator – design, status and development. Proc SPIE Int Soc Opt Eng:7133–713346 https://doi.org/10.1117/12.821252

4. Koenders L (2003) Preliminary comparison on nanometrology according to the rules of CCL key comparison, nano 2 – step height Standards. Physikalisch-Technische Bundesanstalt, Braunschweig, p 119

5. Mares AI, Bergmans RH, Kotte GJWL, Tromp RR (2009) Traceability of the F25 vision system for calibration of grated structures with sub-micron accuracy. Proc SPIE Int Soc Opt Eng:7390–739004 https://doi.org/10.1117/12.827545

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