Method of fabricating an array of diffractive optical elements by using a direct laser lithography

Author:

Kim Young-Gwang,Rhee Hyug-Gyo,Ghim Young-Sik,Lee Yun-Woo

Publisher

Springer Science and Business Media LLC

Subject

Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering

Reference17 articles.

1. Srisungsitthisunti P, Ersoy OK, Xu X (2009) Laser direct writing of volume modified Fresnel zone plates. J Opt Soc Am 24(9):2090–2096

2. Wieland M, Frueke R, Wilhein T, Spielmann C, Pohl M, Kleineberg U (2002) Submicron extreme ultraviolet imaging using high-harmonic radiation. Appl Phys Lett 81(14):2520–2522

3. Suzuki Y, Takeuchi A, Takano H, Uesugi K, Oka T, Inoue K (2004) X-ray imaging microscopy using Fresnel zone plate objective and quasimonochromatic undulator radiation. Rev Sci Instrum 75(4):1155–1157

4. Smith HI, Menon R, Patel A, Chao D, Walsh M, Barbastathis G (1994) Zone-plate-array lithography: A low-cost complement or competitor to scanning-electron-beam lithography. Microelectron Eng 33(4):567–572

5. Tripathi A, Chronis N (2011) A doublet microlens array for imaging micron sized objects. J Micromech Microeng 21(105024):1–6

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