Multiparameter optimization design of chemical mechanical polishing for planar optics

Author:

Cao Mingchen,Zhao Huiying,Xie Ruiqing,Zhao Lingyu,Zhao Shijie,Bai Jinfeng

Funder

Science Challenge Project of China

State Administration for Science, Technology and Industry for National Defense

Complete equipment project for ultra-precision processing of optical materials

Publisher

Springer Science and Business Media LLC

Subject

Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering

Reference27 articles.

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2. Miller GH, Moses EI, Wuest CR (2004) The national ignition facility. Opt Eng 43(12):2841–2854

3. Haynam CA, Wegner PJ, Auerbach JM, Bowers MW, Dixit SN, Erbert GV, Heestand GM, Henesian MA, Hermann MR, Jancaitis KS, Manes KR (2007) National ignition facility laser performance status. Appl Opt 46(16):3276–3303

4. Zhang C, Zhao H, Zhu X, Zhao S, Jiang C (2018) Design of an ultraprecision computerized numerical control chemical mechanical polishing machine and its implementation. Opt Eng 57(1):015104

5. Li C, Li X, Wu Y, Zhang F, Huang H (2019) Deformation mechanism and force modelling of the grinding of YAG single crystals. Int J Mach Tool Manu 143:23–37

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