A 32 × 32 temperature and tactile sensing array using PI-copper films

Author:

Yang Y.-J.,Cheng M.-Y.,Shih S.-C.,Huang X.-H.,Tsao C.-M.,Chang F.-Y.,Fan K.-C.

Publisher

Springer Science and Business Media LLC

Subject

Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering

Reference27 articles.

1. Kane BJ, Cutkosky MR, Kovacs GTA (2000) A traction stress sensor array for use in high-resolution robotic tactile imaging. Journal of Microelectromechanical Systems 9(4):425–433

2. Wang L, Beebe DJ (2000) A silicon-based shear force sensor: development and characterization. Sens Actuators A 84:33–44

3. Engel J, Chen J, Liu C (2003) Development of polyimide flexible tactile sensor skin. J Micromech Microeng 13(3):359–366

4. Jiang F, Tai YC, Walsh K, Tsao T, Lee GB, Ho CM (1997) A flexible MEMS technology and its first application to shear stress sensor skin. Proceedings of IEEE MEMS’97, pp 465–470

5. Hwang ES, Seo JH, Kim YJ (2006) A polymer-based flexible tactile sensor for normal and shear load detection. Proceedings of IEEE MEMS’06, pp 714–717

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