Publisher
Springer Science and Business Media LLC
Subject
Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering
Reference36 articles.
1. Laser DJ, Santiago JG (2004) A review of micropumps. J Micromech Microeng 14(6):35–64. doi: 10.1088/0960-1317/14/6/R01
2. Jin X, Ladabaum I, Degertekin FL, Calmes S, Khuri-Yakub BT (1999) Fabrication and characterization of surface micromachined capacitive ultrasonic immersion transducers. IEEE ASME J Microelectromech Syst 8(1):100–114
3. Maeda R, Tsaur JJ, Lee SH, Ichiki M (2005) Microactuators based on thin films. In: Setter N (ed) Electroceramic-based MEMS: fabrication-technology and applications. Springer, Heidelberg, pp 19–35
4. Defa E, Millon C, Malhaire C, Barbier D (2002) PZT thin films integration for the realisation of a high sensitivity pressure microsensor based on a vibrating membrane. Sens Actuators A Phys 99(1–2):64–67. doi: 10.1016/S0924-4247(01)00883-4
5. Crescini D, Marioli D, Taroni A (1998) Piezoelectric thick-film fluid density sensor based on resonant frequency vibration. In: Proceedings of the IEEE Instrumentation and Measurement Technology Conference, p. 1368–1371
Cited by
15 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献