Author:
Bordatchev Evgueni V.,Hafiz Abdullah M. K.,Tutunea-Fatan O. Remus
Publisher
Springer Science and Business Media LLC
Subject
Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering
Reference60 articles.
1. Jarosch UK, Massmann F, Schmidt J, Smandek B (2003) From welding to polishing. Ind Laser Solutions 4:10–12
2. Tuckerman DB, Weisberg AH (1986) Planarization of gold and aluminum thin-films using a pulsed laser. IEEE Electronic Device Letters 7(1):1–4
3. Mukai R, Sasaki N, Nakano M (1987) High-aspect-ratio via-hole filling with aluminum melting by excimer laser irradiation for multilevel interconnection. IEEE Electronic Device Letters 8(2):76–78
4. Willenborg W (2011) Polishing with laser radiation. In: Poprawe R (ed) Tailored light 2. Springer, Berlin, pp 196–202
5. Willenborg E, Wissenbach K, Poprawe R (2003) Polishing by laser radiation. In: Proceedings of the 2nd International WLT Conference on Lasers in Manufacturing, Munich, Germany, 297–300
Cited by
154 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献