Melt-conditioned vertical gradient freeze (MCVGF) to increase growth speed and process efficiency: a modelling approach
Author:
Funder
National Science Council
Publisher
Springer Science and Business Media LLC
Subject
Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering
Link
https://link.springer.com/content/pdf/10.1007/s00170-023-12277-1.pdf
Reference26 articles.
1. Glacki A (2014) VGF growth of 4” GaAs single crystals with traveling magnetic fields. Doctoral Dissertation, Humboldt-Universität zu Berlin
2. Amon J et al (1996) Growth of 2″ InP and GaAs crystals by the vertical gradient freeze (VGF) technique and characterization. J Cryst Growth 166(1–4):646–650
3. Iseler G (1981) Liquid-encapsulated Czochralski growth of InP crystals. J Cryst Growth 54(1):16–20
4. Zhou Y et al (2021) Evaluation of residual stress in InP and InAs (100) substrates obtained from single crystals grown by LEC and VGF methods. Mater Sci Semicond Process 121:105460
5. Ecklebe S et al (2021) Model predictive control of the vertical gradient freeze crystal growth process. IFAC-PapersOnLine 54(6):218–225
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