Assembling ball-ended styli for CMM's tactile probing heads on micro EDM

Author:

Sheu Dong-Yea,Cheng Chung-Chieh

Publisher

Springer Science and Business Media LLC

Subject

Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering

Reference9 articles.

1. Leach RK (2009) Fundamental principles of engineering nanometrology. Elsevier, Amsterdam

2. Takaya Y, Takahashi S, Miyoshi T, Saito K (1999) Development of the nano-CMM probe based on laser trapping technology. Ann CIRP 48(1):421–424

3. Sheu DY (2005) Micro-spherical probes machining by EDM. J Micromech Microeng 15:185–189

4. Sheu DY (2004) Multi-spherical probe machining by EDM: combining WEDG technology with one pulse electro discharge. J Mater Process Technol 149:597–603

5. Fan KC, Hsu HY, Hung PY, Wang W (2006) Experimental study of fabricating a microball tip on an optical fibre. J Opt A Pure Appl Opt 8:782–787

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