Analysis on microfinger with grooved patterns and its application in electric–thermal microgripper

Author:

Zheng Xiaohu,Chen Xing,Kim Ji-Kwan,Lee Dong-Weon

Publisher

Springer Science and Business Media LLC

Subject

Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering

Reference22 articles.

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2. Lee Y, Lim G, Moon W (2005) A piezoelectric micro-cantilever bio-sensor using the mass-micro-balancing technique with self-excitation. Nanotechnology 1:477–480

3. Shin S, Song S, Lee Y (2003) Fabrication and sensing behavior of piezoelectric microcantilever for nanobalance. Jpn J Appl Phys 42:19–23

4. Saeidpourazar R, Jalili N (2009) Towards microcantilever-based force sensing and manipulation: modeling, control development and implementation. Int J Rob Res 28:464–483

5. Vidhya S, Praveen Kumar G, Mathew L (2010) Design and TEM Simulation of a MEMS based microcantilever cardiac marker sensor. J Nanotechnol Eng Med 1:014501–4

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