Author:
Li Meng,Liu Jian,Zhang Xiaoping,Tian Yaqin,Jiang Kyle
Funder
National Natural Science Foundation of China
European Horizon 2020 project
Shanxi Scholarship Council of China
Fundamental Research Funds for the central Universities
Publisher
Springer Science and Business Media LLC
Subject
Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering
Reference21 articles.
1. Luo X, Cheng K, Webb D, Wardle F (2005) Design of ultraprecision machine tools with applications to manufacture of miniature and micro components. J Mater Proces Tech 167:515–528
2. Ming P, Zhu D, Hu Y, Zeng Y (2006) Experimental Research on Fabrication of Micro-structures & Micro-devices by UV-LIGA. China Mechanical Engineering 17:2216–2220
3. Lorenz H, Despont M, Fahrnl N, LaBianca N, Renaud P (1997) SU-8: a low-cost negative resist for MEMS. J MicromechMicroeng 7:121–124
4. Wei X, Prewett P D, Jiang K (2007) Electrochemical co-deposition of nickel-alumina nanocomposite for microsystem applications. Proceedings of the 7th IEEE International Conference Nanotechnology 34–38.
https://doi.org/10.1109/NANO.2007.4601135
5. Jiang K, Lancaster MJ, Llamas-Garro I, Jin P (2005) SU-8 Ka-band filter and its microfabrication. J Micromech Microeng 7:1522–1526
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