Surface evolution and subsurface damage mechanism in fixed abrasive lapping of Silicon carbide
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Publisher
Springer Science and Business Media LLC
Link
https://link.springer.com/content/pdf/10.1007/s00170-024-13604-w.pdf
Reference32 articles.
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2. Ai TC, Liu J, Qiu HJ, Wang XZ (2021) Removal behavior and performance analysis of defective silicon carbide in nano-grinding. Precis Eng 72:858–869. https://doi.org/10.1016/j.precisioneng.2021.07.011
3. Lin B, Junpeng Z, Zhong-Chen C, Jiannan Z, Tian H (2022) Theoretical and experimental investigation on surface generation and subsurface damage in fixed abrasive lapping of optical glass. Int J Mech Sci 215. https://doi.org/10.1016/J.IJMECSCI.2021.106941
4. Dong Z, Cheng H (2014) Study on removal mechanism and removal characters for SiC and fused silica by fixed abrasive diamond pellets. Int J Mach Tools Manuf 85:1–13. https://doi.org/10.1016/j.ijmachtools.2014.04.008
5. Zhang Q, To S, Zhao Q, Guo B, Zhang G (2015) Impact of material microstructure and diamond grit wear on surface finish in micro-grinding of RB-SiC/Si and WC/Co carbides. Int J Refract Met Hard Mater 51:258–263. https://doi.org/10.1016/j.ijrmhm.2015.04.026
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