Calibration of a white light interferometer for the measurement of micro-scale dimensions

Author:

Ferri Carlo,Faraway Julian,Brousseau Emmanuel

Publisher

Springer Science and Business Media LLC

Subject

Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering

Reference22 articles.

1. Akaike H (1974) A new look at the statistical model identification. IEEE Trans Automat Contr AC-19(6):716–723

2. BSI—British Standards Institution (1993) BS 4311-3:1993. Specification for gauge blocks and accessories—part 3: gauge blocks in use. BSI, London

3. BSI—British Standards Institution (1996) BS ISO 11095: 1996. Implementation of ISO 11095:1996. Linear calibration using reference materials. BSI, London

4. BSI—British Standards Institution (1999) BS EN ISO 3650:1999. Geometrical product specification (GPS)—length standards—gauge blocks. BSI, London

5. CIRD—Centro interdipartimentale di Ricerca Didattica-Università di Udine (2002) The temperature of the human body. http://web.uniud.it/cird/secif/termo/stati/es6.htm . Accessed 13 June 2008 (in Italian)

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