1. F.B. Kaufman, D.B. Thompson, R.E. Broadie, M. A Jaso, W.L. Guthrie, D.J. Pearson, and M.B. Small, J. Electrochem. Soc., 138, 3460, 1991.
2. Gmelin Handbook of Inorganic Chemistry, 8th ed., Tungsten Supplement A7, Springer—Verlag, Berlin, 1987.
3. E.A. Kneer, C. Raghunath, S. Raghavan and J.S. Jeon, J. Electrochem. Soc., 143 (12), 4095, 1996.
4. D. Tamboli, S. Seal, V. Desai, and A. Maury, J. Vac. Sci. Technol. A 17 (4), 1168, 1999.
5. D.J. Stein, D.L. Hetherington, and J.L. Cecchi, Presentation at the 1st Annual Northern California AVS CMP User’s Group Meeting, San Jose, November 1996.