Si Silicon
Author:
Publisher
Springer Berlin Heidelberg
Link
http://link.springer.com/content/pdf/10.1007/978-3-662-09901-8.pdf
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. COMPOSITION, STRUCTURE, AND FUNCTIONAL PROPERTIES OF THIN SILICON NITRIDE FILMS GROWN BY ATOMIC LAYER DEPOSITION FOR MICROELECTRONIC APPLICATIONS (REVIEW OF 25 YEARS OF RESEARCH);Journal of Structural Chemistry;2022-07
2. The effect of upper layer in optical capacitor based on SiO2/SiNx/SiO2/Si structure;Optical Materials;2022-05
3. Silicon nitride photonics: from visible to mid-infrared wavelengths;Silicon Photonics XIII;2018-02-22
4. Review—Silicon Nitride and Silicon Nitride-Rich Thin Film Technologies: Trends in Deposition Techniques and Related Applications;ECS Journal of Solid State Science and Technology;2017
5. Linear propagation properties for a 300 nm film height Silicon Nitride photonic integration platform in the optical telecom C-band;Advanced Photonics 2017 (IPR, NOMA, Sensors, Networks, SPPCom, PS);2017
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