Author:
Fißan Heinz,Trampe Andreas,Asbach Christof
Publisher
Springer Berlin Heidelberg
Reference29 articles.
1. Mittal, K.L. (Hrsg.): Particles on Surfaces 1: Detection, Adhesion, and Removal. Plenum, New York (1988)
2. Mittal, K.L. (Hrsg.): Particles on Surfaces 2: Detection, Adhesion, and Removal. Plenum, New York (1990)
3. Yook, S.J., Fissan, H., Asbach, C., Kim, J.H., Dutcher, D.D., Yan, P.Y., Pui, D.Y.H.: Experimental investigations on particle contamination of masks without protective pellicles during vibration or shipping of mask carriers. IEEE Trans. Semicond. Manuf. 20, 578–584 (2007)
4. Kim, J.H., Asbach, C., Yook, S.J., Fissan, H., Orvek, K.J., Ramamoorthy, A, Yan, P.Y., Pui, D.Y.H.: Protection schemes for critical surface in vacuum environments. J. Vac. Sci. Technol. A. 23, 1319–1324 (2005a)
5. Springer, G.S.: Homogeneous nucleation. Adv. Heat Transf. 14, 281–346 (1978)