Application of Bonded Wafers to the Fabrication of Electronic Devices

Author:

Nevin A. W.

Publisher

Springer Berlin Heidelberg

Reference149 articles.

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2. Amaratunga GAJ, Udrea F, McMahon RA (1999) Power integrated circuits: devices and applications. In: Proc 1999 bipolar circuits and technology meeting. IEEE, pp 7579

3. Amirfeiz P, Bengtsson S, Bergh M, Zanghellini E, Börjesson L (2000) Formation of silicon structures by plasma-activated wafer bonding. J Electrochem Soc 147: 26932698

4. Armstrong GA, Gamble HS (1999) Simulation of self heating effects in heterojunction bipolar transistors fabricated in wafer bonded SOI substrates. In: Hemment PLF (ed) Silicon-on-insulator technology and devices IX. Electrochem Soc, Pennington, PV 993, pp 249–254

5. Arnold E (1994) Silicon-on-insulator devices for high voltage and power IC applications. J Electrochem Soc 141: 1983–1988

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