1. See, e.g., L.I. Maissel, R. Glang (eds.): Handbook of Thin Film Technology ( McGraw-Hill, New York 1970 )
2. For a review see, e.g., J. Bloem, L.J. Giling: in Current Topics in Materials Science, Vol. 1, ed. by E. Kaldis ( North-Holland, New York 1978 ) p. 147
3. I. Brodie, J. Muray: The Phyics of Microfabrication ( Plenum, New York 1982 )
4. N.G. Einspruch (ed.): VLSI Electronics, Microstructure Science, Vol. 7 ( Academic, New York 1983 )
5. A.G. Baker, W.C. Morris: Rev. Sci. Instrum. 32, 458 (1961)