An electrical-coupling-suppressing MEMS gyroscope with feed-forward coupling compensation and scalable fuzzy control
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Computer Science
Link
http://link.springer.com/content/pdf/10.1007/s11432-015-0931-8.pdf
Reference22 articles.
1. Lee A, Ko H, Cho D I D, et al. Non-ideal behavior of a driving resonator loop in a vibratory capacitive microgyroscope. Microelectronics J, 2008, 39: 1–6
2. Acar C, Shkel A M. An approach for increasing drive-mode bandwidth of MEMS vibratory gyroscopes. J Microelectromech Syst, 2005, 14: 520–528
3. Alper S E, Akin T. A symmetric surface micro-machined gyroscope with decoupled oscillation modes. Sensors Actuat A Phys, 2002, 97–98: 347–358
4. Weinberg M S, Kourepenis A. Error sources in in-plane silicon tuning-fork MEMS gyroscopes. J Microelectromech Syst, 2006, 15: 479–491
5. Saukoski M, Aaltonen L, Halonen K A I, et al. Zero-rate output and quadrature compensation in vibratory MEMS gyroscopes. IEEE Sensors J, 2007, 7: 1639–1652
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