Finite element and analytical fluid-structure interaction analysis of the pneumatically actuated diaphragm microvalves
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Computational Mechanics
Link
http://link.springer.com/content/pdf/10.1007/s00707-011-0508-9.pdf
Reference33 articles.
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3. Takao H., Miyamura K., Ebi H., Ashiki M., Sawada K., Ishida M.: A MEMS microvalve with PDMS diaphragm and two-chamber configuration of thermo-pneumatic actuator for integrated blood test system on silicon. Sens. Actuators A Phys. 119, 468–475 (2005)
4. Pelesko J.A., Bernstein D.H.: Modeling MEMS and NEMS. Chapman & Hall/CRC, London (2003)
5. Yoo J.C., Choi Y.J., Kang C.J., Kim Y.S.: A novel polydimethylsiloxane microfluidic system including thermopneumatic-actuated micropump and Paraffin-actuated microvalve. Sens. Actuators A Phys. 139, 216–220 (2007)
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