Author:
Moeenfard Hamid,Darvishian Ali,Ahmadian Mohammad Taghi
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Computational Mechanics
Reference32 articles.
1. Younis, M.I.: Modeling and Simulation of Microelectromechanical Systems in Multi-Physics Fields, PhD, Engineering Science and Mechanics, Virginia Polytechnic Institute and State, Blacksburg (2004)
2. Varadan, V.K., Vinoy, K.J., Jose, K.A.: RF MEMS and their Applications. Wiley, Chichester (2003)
3. Chao P.C.P., Chiu C.W., Tsai C.Y.: A novel method to predict the pull-in voltage in a closed form for micro-plates actuated by a distributed electrostatic force. J. Micromech. Microeng. 16, 986–998 (2006)
4. Zavracky P.M., Majumder S., McGruer N.E.: Micromechanical switches fabricated using nickel surface micromachining. J. Microelectromech. Syst. 6, 3–9 (1997)
5. Hornbeck L.J., Howell T.R., Knipe R.L., Mignardi M.A.: Digital micromirror deviceTM— commercialization of a massively parallel MEMS technology. Am. Soc. Mech. Eng. Dyn. Syst. Control Div. 62, 3–8 (1997)
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