Oxidation mechanism of aluminum nitride revisited
Author:
Publisher
Springer Science and Business Media LLC
Subject
Ceramics and Composites,Electronic, Optical and Magnetic Materials
Link
http://link.springer.com/article/10.1007/s40145-016-0213-1/fulltext.html
Reference20 articles.
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2. Kar JP, Bose G, Tuli S, et al. Morphological investigation of aluminium nitride films on various substrates for MEMS applications. Surf Eng 2009, 25: 526–530.
3. Yeh C-T, Tuan W-H. Pre-oxidation of AlN substrates for subsequent metallization. J Mater Sci: Mater El 2015, 26: 5910–5916.
4. Iwase N, Anzai K, Shinozaki K, et al. Thick film and direct bond copper forming technologies for aluminum nitride substrate. IEEE T Compon Hybr 1985, 8: 253–258.
5. Chiang WL, Greenhut VA, Shanefield DJ, et al. Effect of substrate and pretreatment on copper to AIN direct bonds. In Proceedings of the 15th Annual Conference on Composites and Advanced Ceramic Materials, Part 2 of 2: Ceramic Engineering and Science Proceedings, 1991, 12, DOI: 10.1002/9780470313848.ch38.
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