Development toward an all-silicon integrated thermal management system: the integrated MCM
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Published:2000-11-27
Issue:6
Volume:6
Page:222-228
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ISSN:0946-7076
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Container-title:Microsystem Technologies
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language:
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Short-container-title:Microsystem Technologies
Author:
Pilchowski J.,Hölke A. D.,Henderson H. T.,Kazmierczak M.,Gerner F. M.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials