Method of Process Parameter Identification and Resist Profile Design for Thin-Film Pattern Formation
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Publisher
Springer London
Link
http://link.springer.com/content/pdf/10.1007/978-1-84882-694-6_57.pdf
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Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A Design Method for Thin Film Patterning Process via Lift-Off Technique;Key Engineering Materials;2012-11
2. Method for Film Thickness Calculation and Resist Profile Design in Thin Film Patterning via Lift-off Process;QUARTERLY JOURNAL OF THE JAPAN WELDING SOCIETY;2012
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