Silicon nitride homogeneity and compositional analysis by nuclear track counting and 14 MeV NAA-Reference-Cited by-同舟云学术

Silicon nitride homogeneity and compositional analysis by nuclear track counting and 14 MeV NAA

Published:1987-03 Issue:1 Volume:110 Page:235-243
ISSN:0236-5731
Container-title:Journal of Radioanalytical and Nuclear Chemistry Articles
language:en
Short-container-title:Journal of Radioanalytical and Nuclear Chemistry, Articles

Author:

Yegnasubramanian S.,Mitchell J. W.

Publisher

Springer Science and Business Media LLC

Subject

Health, Toxicology and Mutagenesis,Public Health, Environmental and Occupational Health,Spectroscopy,Pollution,Radiology, Nuclear Medicine and imaging,Nuclear Energy and Engineering,Analytical Chemistry

Link

http://link.springer.com/content/pdf/10.1007/BF02055026.pdf

Reference15 articles.

1. W. R. WILCOX, (Ed.), Preparation and Properties of Solid State Materials, Vol. 7, Growth Mechanisms and Silicon Nitride, Marcel Dekker, Inc., 1982.

2. J. T. MILEK, (Ed.), Handbook of Electronic Materials, Vols 3 and 6, Silicon Nitride for Microelectronic Applications, Parts I and II, IFI/Plenum, 1971.

3. VAN OOSTROM et al., J. Vac. Technol., 20 (1982) 953.

4. V. RAVNIK et al., Zh. Anal. Khim., 34 (1939) 715.

5. L. D. KEELE, Determination of Percent Nitrogen in Silicon Nitride, Report Y-2085, Oak Ridge, 1977.

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