1. Sematech Internatonal Roadmap Committee, International Technology Roadmap for Semiconductors, 2003 Edition, Interconnect, 2003.
2. L.B. Freund and S. Suresh, Thin Film Materials: Stress, Defect Formation and Surface Evolution, Cambridge University Press, Cambridge, UK, 2003.
3. E.S. Machlin, Materials Science in Microelectronics: The Relationships between Thin Film Processing and Structure, Giro Press, Croton-on-Hudson, NY, 1995.
4. D.L. Smith, Thin Film Deposition: Principles and Practice, McGraw-Hill, Boston, MA, 1995.
5. M. Ohring, Materials Science of Thin Films, Deposition and Structure, Academic Press, San Diego, CA, 2002.