Developed Method to Evaluate Some Optical Parameters in Gauge Block Measurements Using Ellipsometry
Author:
Publisher
Springer Science and Business Media LLC
Subject
Physics and Astronomy (miscellaneous)
Link
https://link.springer.com/content/pdf/10.1007/s12647-021-00521-6.pdf
Reference22 articles.
1. J.E. Decker, Some important characteristics of gauge-block artefacts for international comparison. Metrologia, 38 (2001) 269–272.
2. H. Hussein, N. Farid and O. Terra, Absolute gauge block calibration using ultra-precise optical frequency synthesizer locked to a femtosecond comb. Appl. Opt., 54 (2015) 622.
3. ISO3650, Geometrical product specifications (GPS) - Length standards - Gauge blocks (1998)
4. Yasushi Ishii, Phase Correction in Measurement of Gauge Blocks Using a New Double-ended Interferometer, SPIE Conference on recent developments in optical gauge block metrology, SPIE vol. 3477 (1998).
5. Ted Doiron and John Beers, The Gauge Block Handbook, NIST Monograph 180, National Institute of Standards and Technology, U. S. Department of commerce, pp. 5 (1995).
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