Structure and crystallographic orientation of aluminum films on n-and p-silicon in the Al-Ti-Si and Al-Ti-SiOx-Si systems

Author:

Gurskii L. I.,Snitkovskii Yu. P.

Publisher

Springer Science and Business Media LLC

Subject

Metals and Alloys,Mechanics of Materials,Condensed Matter Physics

Reference10 articles.

1. A. A. Chernyshev, Foundations of Reliability of Semiconductor Devices and Integrated Microcircuits [in Russian], Radio Svyaz', Moscow (1988).

2. Yu. P. Snitkovskii, “Failures of discrete transistors due to recrystallization in aluminum metallization,” Elektron. Tekh., Ser. 8, Upravl. Kach., Metrol., Standardiz., Issue 4, 38–41 (1979).

3. V. P. Kazimirov, G. I. Batalin, E. V. Buzaneva, et al., “A study of structural transformations and phase composition of thin aluminum films with silicon,” Neorgan. Mater., 15(2), 217–219 (1979).

4. P. P. Goidenko, L. I. Gurskii, V. M. Kovalenko, et al., “Structure and electrical properties of aluminum films annealed on silicon substrates,” Izv. Akad. Nauk SSSR, Ser. Metally, No. 1, 201–205 (1975).

5. S. Yoo, Y-H. Kim, and C. S. Yoon, “Effect of the Ti-underlayer microstructure on the texture of Al films,” J. Vac. Sci. Technol. B, 19(3), 856–858 (2001).

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