Force Sensing Optimization and Applications-Reference-Cited by-同舟云学术

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Force Sensing Optimization and Applications

Published:2010 Issue: Volume: Page:287-298
ISSN:1874-6500
Container-title:NATO Science for Peace and Security Series B: Physics and Biophysics
language:
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Author:

Doll Joseph C.,Park Sung-Jin,Rastegar Ali J.,Harjee Nahid,Mallon Joseph R.,Hill Ginel C.,Barlian A. Alvin,Pruitt Beth L.

Publisher

Springer Netherlands

Link

http://link.springer.com/content/pdf/10.1007/978-90-481-3807-4_23

Reference38 articles.

1. O. Hansen, A. Boisen, Noise in piezoresistive atomic force microscopy, Nanotechnology 10, 51 (1999)

2. J. Harley, T. Kenny, 1/f noise considerations for the design and process optimization ofpiezoresistive cantilevers, Microelectromechanical Systems (2000)

3. X. Yu, J. Thaysen, O. Hansen, A. Boisen, Optimization of sensitivity and noise in piezoresistive cantilevers, Journal of Applied Physics (2002)

4. A. Merlos, J. Santander, M. Alvarez, F. Campabadal, Optimized technology for the fabrication of piezoresistive pressure sensors, Journal Of Micromechanics And Microengineering 10, 204 (2000)

5. B. Bae, B. Flachsbart, K. Park, M. Shannon, Design optimization of a piezoresistive pressure sensor considering the output signal-to-noise ratio, Journal Of Micromechanics And Microengineering 14, 1597 (2004)

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Microforce-Sensing Tools and Methodologies for Micromechanical Metrology;Signal Measurement and Estimation Techniques for Micro and Nanotechnology;2011

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