Interpreting interferometric height measurements using the instrument transfer function
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Publisher
Springer Berlin Heidelberg
Link
http://link.springer.com/content/pdf/10.1007/3-540-29303-5_3
Reference7 articles.
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4. Lehman, P. (2003) Optical versus tactile geometry measurement—alternatives or counterparts. Proc. SPIE 5144: 183–196.
5. Barakat, R. (1965) Determination of the optical transfer function directly from the edge spread function. J. Opt. Soc. of Am. 55: 1217.
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