Microfluidics and Their Applications to Lab-on-a-Chip

Author:

Ahn Chong H.,Choi Jin-Woo

Publisher

Springer Berlin Heidelberg

Reference82 articles.

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3. H. Jansen, M. de Boer, R. Legtenberg, M. Elwenspoek: The black silicon method: A universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control, J. Micromech. Microeng. 5 (1995) 115–120

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5. C. Linder, T. Tschan, N. F. de Rooij: Deep dry etching techniques as a new IC compatible tool for silicon micromachining, Technical Digest of the 6th International Conference on Solid-State Sensors and Actuators (Transducers '91), San Francisco June 24–27, 1991 (IEEE, Piscataway 1991) 524–527

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