Additive direct-write microfabrication for MEMS: A review
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering
Link
http://link.springer.com/article/10.1007/s11465-017-0484-4/fulltext.html
Reference180 articles.
1. Frazier A B, Warrington R O, Friedrich C. The miniaturization technologies: Past, present, and future. IEEE Transactions on Industrial Electronics, 1995, 42(5): 423–430
2. Yazdi N, Ayazi F, Najafi K. Micromachined inertial sensors. Proceedings of the IEEE, 1998, 86(8): 1640–1659
3. Gessner T, Doetzel W, Billep D, et al. Silicon mirror arrays fabricated by using bulk and surface micromachining. Proceedings of the SPIE, Miniaturized Systems with Micro-Optics and Micromechanics II, 1997, 3008: 296–305
4. Tsung Pan A I. US Patent 4894664, 1990-01-16
5. Lemkin M, Boser B E. A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics. IEEE Journal of Solid-State Circuits, 1999, 34(4): 456–468
Cited by 35 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Laser-Based Fabrication Process for Piezoresistive Cantilever Using Flash Laser Annealing;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
2. Printing MEMS: Application of Inkjet Techniques to the Manufacturing of Inertial Accelerometers;Micromachines;2023-11-10
3. A critical review of additive material manufacturing through electrochemical deposition techniques;Additive Manufacturing;2023-09
4. Direct Manufacturing Technology for High‐Precision Follow‐the‐Shape Circuits on Complex, Hard, Curved Surfaces;Advanced Materials Technologies;2023-07-20
5. Processes for the 3D Printing of Hydrodynamic Flow-Focusing Devices;Micromachines;2023-07-07
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3