MEMS-based thermoelectric infrared sensors: A review
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering
Link
http://link.springer.com/article/10.1007/s11465-017-0441-2/fulltext.html
Reference44 articles.
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4. Du C H, Lee C. Characterization of thermopile based on complementary metal-oxide-semiconductor (CMOS) materials and post CMOS micromachining. Japanese Journal of Applied Physics, Part 1, Regular Papers & Short Notes, 2002, 41(6B): 4340–4345
5. Xu D, Xiong B, Wang Y. Modeling of front-etched micromachined thermopile IR detector by CMOS technology. Journal of Microelectromechanical Systems, 2010, 19(6): 1331–1340
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