Characteristics of Li-ion micro batteries fully batch fabricated by micro-fluidic MEMS packaging

Author:

Hahn RobertORCID,Ferch Marc,Kyeremateng Neil Amponsah,Hoeppner Katrin,Marquardt Krystan,Elia Giuseppe Antonio

Funder

FP7 Nanosciences, Nanotechnologies, Materials and new Production Technologies

Bundesministerium für Forschung und Technologie

Fraunhofer-Gesellschaft

Bundesministerium für Bildung und Forschung

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. Bates JB, Dudney NJ, Neudecker B, Ueda A, Evans CD (2000) Thin-film lithium and lithium-ion batteries. Solid State Ion 135:33–45

2. Bimbaud I (2017) A smart energy storage device. http://www.idtechex.com/events/presentations/a-smart-energy-storage-device-that-enables-digitalization-of-the-world-009589.asp . Accessed 29 Aug 2017

3. Ferrari S, Loveridge M, Beattie SD et al (2015) Latest advances in the manufacturing of 3D rechargeable lithium microbatteries. J Power Sources 286:25–46

4. Hahn R, Marquardt K, Thunman M, Töpper M, Wilke M, Ferch M, Huynh QH, Lang KD (2012) Silicon integrated micro batteries based on deep reactive ion etching and through silicon via technologies. In: ECTC. https://doi.org/10.1109/ectc.2012.6249045

5. Hahn R, Hoeppner K, Ferch M, Marquardt K, Lang K D (2014) Development of integrated lithium-ion micro batteries. In Microelectronics Packaging in the 21th Century, Chapter VIII, Fraunhofer Verlag 2014, ISBN: 978-3-8396-0826-5, pp 392–399

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