An effective microsystem by design of a twin-plate tool for precision removal
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://link.springer.com/content/pdf/10.1007/s00542-010-1112-y.pdf
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3. Besbes S, Ouada HB, Davenas J, Ponsonnet L, Jaffrezic NA (2006) Effect of surface treatment and functionalization on the ITO properties for OLEDs. Mater Sci Eng 26:505–510
4. Cagnon L, Kirchner V, Kock M, Schuster R, Ertl G, Gmelin WT, Kuck H (2003) Electrochemical miromachining of stainless steel by ultra short voltage pulses. Z Phys Chem 217:299–313
5. Cueff R, Baud G, Benmalek M, Besse JP (1997) Characterization and adhesion study of thin alumina coatings sputtered on PET. Appl Surf Sci 115:292–298
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