Author:
Li Ting,Shang Haiping,Zhang Qunying,Wang Weibing
Funder
National Basic Research Program of China
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Charles SS (1954) Piezoresistance effect in germanium and silicon. Phys Rev 94(1):42–49
2. Herrera-May AL, Soto-Cruz BS, López-Huerta F, Aguilera Cortés LA (2009) Electromechanical analysis of a piezoresistive pressure microsensor for low-pressure biomedical applications. Rev Mex Fis 55(1):14–24
3. Huang Z, Ma X (2015) An improvement of membrane structure of MEMS piezoresistive pressure sensor. In: 2015 16th international conference on electronic packaging technology, Changsha
4. Matsudaa K, Suzuki K, Yamamura K (1993) Nonlinear piezoresistance effects in silicon. J Appl Phys 73(4):1838–1847. https://doi.org/10.1063/1.353169
5. Nisanth A, Suja KJ, Rama K (2014) Performance analysis of a silicon piezoresistive pressure sensor based on diaphragm geometry and piezoresistor dimensions. In: 2014 international conference on circuit, power and computing technologies [ICCPCT], Nagercoil
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