Design of a novel gear-like disk resonator gyroscope with high mechanical sensitivity-Reference-Cited by-同舟云学术

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Design of a novel gear-like disk resonator gyroscope with high mechanical sensitivity

Published:2020-10-03 Issue:7 Volume:27 Page:2715-2722
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Feng Jun^ORCID,Zhang Weiping^ORCID,Gu Liutao,Liu Zhaoyang

Funder

National Natural Science Foundation of China

National Key Laboratory of Science and Technology on Micro/Nano Fabrication

Professional Technical Service Platform of Shanghai

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://link.springer.com/content/pdf/10.1007/s00542-020-05047-6.pdf

Reference25 articles.

1. Acar C, Shkel A (2009) MEMS vibratory gyroscopes: structural approaches to improve robustness. MEMS reference shelf. Springer, Boston

2. Ahn CH, Ng EJ, Hong VA, Huynh J, Wang S, Kenny TW (2015) Characterization of oxide-coated polysilicon disk resonator gyroscope within a wafer-scale encapsulation process. J Microelectromech Syst 24(6):1687–1694

3. Challoner AD, Ge HH, Liu JY (2014) Boeing disc resonator gyroscope. In: IEEE/ION position, location and navigation symposium (PLANS), Monterey, CA, USA, pp 504–514

4. Chang CO, Chang GE, Chou CS, Chien WTC, Chen PC (2008) In-plane free vibration of a single-crystal silicon ring. Int J Solids Struct 45(24):6114–6132

5. Cho JY (2012) High-performance micromachined vibratory rate- and rate-integrating gyroscopes. Dissertation, University of Michigan

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1. A High-Symmetry Cobweb-Like Disk Ring Gyroscope Utilizing Rhomboid Spoke;2023 2nd International Conference on Optical Imaging and Measurement (ICOIM);2023-10-20

2. Machine learning algorithm for the structural design of MEMS resonators;Microelectronic Engineering;2023-03

3. A Comparison of Ring and Disk Resonator Gyroscopes Based on Their Degenerate Eigenmode Shapes;Microactuators, Microsensors and Micromechanisms;2022-11-21

4. Flower-like disk resonator for gyroscopic application;Review of Scientific Instruments;2022-11-01

5. Development of a Novel Gear-like Disk Resonator Applied in Gyroscope;Applied Sciences;2022-07-21

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