Author:
Luo Wei,Zhao Hui,Yuan Quan,Peng Bohua,Zhao Jicong,Chen Yu,Yang Jinling,Yang Fuhua
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Baghelani M, Ghavifekr HB, Ebrahimi A (2011) Analysis and suppression of spurious modes of the ring shape anchored RF MEMS contour mode disk resonator. Microsyst Technol 17(10–11):1599–1609
2. Hao Z, Pourkamali S, Ayazi F (2003) VHF single crystal silicon elliptic bulk-mode capacitive disk resonators; part I: design and modeling. J Microelectromech Syst 13(6):1043–1053
3. Kuroda S, Suzuki N, Tanigawa H, Suzuki K (2013) Variable resonant frequency selection for fishbone-shaped microelectromechanical system resonator based on multi-physics simulation. Jpn J Appl Phys 52(6):858–865
4. Liu YF, Xie J, Zhang ML, Yang JL, Yang FH (2011) An effective approach for restraining galvanic corrosion of polycrystalline silicon by hydrofluoric acid-based solutions. J Microelectromech Syst 20(2):460–465
5. Liu YF, Xie J, Zhao H, Luo W, Yang JL, Ji A, Yang FH (2012) An effective approach for restraining electrochemical corrosion of polycrystalline silicon caused by an HF-based solution and its application for mass production of MEMS devices. J Micromech Microeng 22:035003
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A review of research on RF MEMS for metaverse interactions;Journal of Micromechanics and Microengineering;2024-07-25