1. Bao MH (2005) Analysis and design principles of MEMS devices. Elsevier, Amsterdam, pp 297–301
2. Bao MH, Yu LZ, Wang Y (1990) Micro machined beam-diaphragm. Sens Actuators A Phys 21(1–3):137–141
3. Biswas K, Das S, Maurya DK et al (2006) Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface. Sens Actuators A Phys 37(4):321–327
4. Hein S, Schlichting V, Obermerier E (1993) Piezoresistive silicon sensor for very low pressure based on the concept of the stress concentration. Transducers’93, Yokohama
5. Kanda Y (1982) A graphical representation of the piezoresistance coefficients in silicon. IEEE T Electron Dev 29(1):64–70