Author:
Ali Mohammad Yeakub,Loo Yee Wei
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference18 articles.
1. Adams DP, Vasile MJ, Krishnan ASM (2000) Microgrooving and microthreading tools for fabricating curvilinear features. Precis Eng 24(4):347–356
2. Ali MY, Ong AS (2006) Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering. The International Journal of Advanced Manufacturing Technology, DOI 10.1007/s00170-005-0220-9
3. Friedrich CR, Vasile MJ (1996) The micromilling process for high aspect ratio microstructures. Microsyst Technol 2(3):144–148
4. Fu YQ, Ngoi BKA, Ong AS, Lim BH (2000) Data format transferring for FIB microfabrication. Int J Adv Manuf Technol 6(8):600–602
5. Fu G, Loh NH, Tor SB, Tay BY, Morakoshi Y, Maeda R (2005) A variotherm mold for metal injection molding. Microsyst Technol 11(12):1267–1271
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Non-traditional machining techniques for silicon wafers;The International Journal of Advanced Manufacturing Technology;2022-05-25
2. 1.11 Micromachining;Comprehensive Materials Finishing;2017
3. Application of Focused Ion Beam Micromachining: A Review;Advanced Materials Research;2012-10
4. Investigation of Microholes Produced by Focused Ion Beam Micromachining;Advanced Materials Research;2011-06
5. A review of focused ion beam sputtering;International Journal of Precision Engineering and Manufacturing;2010-02