Parallel precision alignment of multiple micro components

Author:

Brecher Christian,Weinzierl Martin

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. Brandau T (2003) Mikroverkapselte Wirkstoffe und Mikrokugeln in pharmazeutischen und kosmetischen Anwendungen. Chem Ingenieur Tech 75(11):1741–1745. doi: 10.1002/cite.200300057

2. Brecher C, Mokwa W, Spanier G, Wolf F, Peschke C (2005) Produktionsprozesse und Anwendungen für die passive Justage von Mikrobauteilen. Kolloquium Mikroproduktion, Fortschritte, Verfahren, Anwendungen. pp 127–142

3. Brecher C, Weinzierl M, Lange S (2006) Development of passive alignment techniques for the assembly of hybrid micro systems. Precision assembly technologies for mini and micro products, proceedings of the IFIP 12, Springer, New York, 611-615, ISBN 0-387-31276-5

4. Brecher C, Weinzierl M, Lange S, Peschke C (2006) Active and passive tool alignment in ultraprecision machining for the manufacturing of highly precise structures. Production engineering—research and development, Annals of the German Academic Society for Production Engineering WGP 8 (XIII/1), pp 193–196

5. Petersen B (2003) Flexible Handhabungstechnik für die automatisierte Mikromontage. Ph.D. RWTH-Aachen

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